Product Information
Wafer Handling
Wafer Shipping

300mm Wafer Shipping Boxes

200mm Wafer Shipping Boxes

150mm Wafer Shipping Boxes
Wafer Processing

300mm Wafer Processing (FOUP)

300mm Wafer Processing

200mm Wafer Processing

200mm PEEK Cassettes
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environments.

200mm PFA Cassettes
This is a cassette for wafers washing made of fluoroplastic PFA, and has been used successfully for a stable product.

200mm PBT Cassettes
Anti-static cassette made of PBT (Polybutylene terephthalate) compounded with conductive material.

200mm Storage Boxes
This box is used to store wafers in clean rooms safely.

200mm Aluminum Cassettes
For surface treatment, in addition to the standard Teflon coating, electroless nickel and anodizing are available.

150mm Wafer Processing

150mm PEEK Cassettes
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environments.

150mm PFA Cassettes
This is a cassette for wafers washing made of fluoroplastic PFA, and has been used successfully for a stable product.

150mm PBT Cassette
Antistatic cassette made of PBT (polybutylene terephthalate) plastics and compounded with conductive materials.

150mm PP Cassettes
This is a highly pure and lightweight PP(polypropylene) plastic cassette.

150mm Storage Boxes
This box is used to store wafers in clean rooms safely.

150mm Aluminum Cassettes
The surface of the slots where the wafers come in contact with the cassette can be treated with electroless nickel and anodizing, in addition to the standard fluorine coating.

125mm Wafer Processing

125mm PEEK Cassettes
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environmenats.

125mm PFA Cassettes
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.

125mm PBT Cassettes
Antistatic cassette made of PBT (polybutylene terephthalate) plastics and compounded with conductive materials.

125mm PP Cassettes
High purity and light weight PP (polypropylene) plastic cassette.

125mm Storage Boxes
A cassette box for safely storing wafer cassettes in the clean room.

125mm Aluminum Cassettes
The surface of the slots where the wafers come in contact with the cassette can be treated with electroless nickel and anodizing, in addition to the standard fluorine coating.

100mm Wafer Processing

100mm PEEK Cassettes
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environments.

100mm PFA Cassettes
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.

100mm PP Cassettes
High purity and light weight PP (polypropylene) plastic cassette.

100mm Aluminum Cassettes
The groove plate surface processing can be done with Ni plating or alumite processing as well as the standard fluoroplastic coating.

75mm and Smaller Wafer Processing

75mm PEEK Cassettes
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environments.

75mm and smaller PFA Cassettes
This is a cassette for wafers washing made of fluoroplastic PFA, and has been used successfully for a stable product.

Square Wafer Handling

Wafer Cassette Accessories
Fluid System
Fittings

Weld Fittings KS Type

KS Fitting Elbow
Small, lightweight joint made of high-purity plastics, and is maintenance-free after installation.

KS Fitting Tee
Small, lightweight joint made of high-purity plastics, and is maintenance-free after installation.

KS Fitting Reducer
Small, lightweight joint made of high-purity plastics, and is maintenance-free after installation.

Weld Fittings SB Type

SB Fitting Elbow
Small, lightweight joint made of high-purity plastics, and is maintenance-free after installation.

SB Fitting Tee
Small, lightweight joint made of high-purity plastics, and is maintenance-free after installation.

SB Fitting Reducer
Small, lightweight joint made of high-purity plastics, and is maintenance-free after installation.

K-LOCK® Tube Fittinings

K-LOCK Male Connector
Clean fittings with a tapered contraction seal that does not require tube processing.

K-LOCK Male Elbow
Clean fittings with a tapered contraction seal that does not require tube processing.

K-LOCK Panel Mount Union
Clean fittings with a tapered contraction seal that does not require tube processing.

K-LOCK Panel Mount Elbow
Clean fittings with a tapered contraction seal that does not require tube processing.

K-LOCK Union
Clean fittings with a tapered contraction seal that does not require tube processing.

K-LOCK Union Elbow
Clean fittings with a tapered contraction seal that does not require tube processing.

K-LOCK Union Tee
Clean fittings with a tapered contraction seal that does not require tube processing.

K-LOCK Reducing Union
Clean fittings with a tapered contraction seal that does not require tube processing.