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Product Information

150mm PFA Cassettes

Wafer Handling

PFA cassettes with a large opening area for improved washing and drying performance.

Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.
・Wafer size:
150mm
・Material:
PFA
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Features

- WD series is a mounted drying cassette with the maximum opening and is not compatible with handles or spin dryers.
- KM-60N is a double pitch specification with a wafer capacity of 12 wafers.

Dimensions

Product List (mm)

Part No. BOX Handles Wafer
Capacity
A1
Length
A2
Width
A3
Height
B2
Slot Pitch
C3
Pocket Flat
D6
Foot Width
D1
D1 Pitch
KM-602-A CB-5605TX HM-60 25 143.4 178.0 171.5 4.76 1.6 89.0 14.54
KM-602-U CB-5605TX HM-60 25 143.4 178.0 171.5 4.76 1.6 89.0 14.54
KM-604-U CB-5605TX HM-60 25 142.2 187.0 165.0 4.76 1.6 89.0 13.97
KM-615-A1 CB-5605TX HM-60 25 143.4 177.8 171.5 4.76 1.5 88.9 14.54
KM-626-U CB-5605TX HM-60 25 143.4 177.8 165.0 4.76 1.5 88.9 14.54
KM-60NA CB-5605TX HM-60 25 142.2 187.0 165.0 4.76 1.6 89.0 13.97
KM-60NAT CB-5605TX HM-60 25 142.8 178.0 171.5 4.76 89.0 14.54
KM-60NM HM-60 25 142.2 187.0 165.0 4.76 1.6 131.0 13.97
KM-60WD 25 134.3 177.8 171.5 4.76 0.8 111.0 14.54
KM-60N 12 142.2 187.0 165.0 9.53 3.5 132.7 14.20
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