Product Information
150mm PFA Cassettes
Wafer Handling
PFA cassettes with a large opening area for improved washing and drying performance.
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.- ・Wafer size：
- 150mm
- ・Material：
- PFA
Product List (mm)
| Part No. | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| KM-615-A1 | 25 | 143.4 | 177.8 | 171.5 | 4.76 | 1.5 | 88.9 | 14.54 |
| KM-626-U | 25 | 143.4 | 177.8 | 165.0 | 4.76 | 1.5 | 88.9 | 14.54 |
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