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Product Information

125mm PFA Cassettes

Wafer Handling

PFA cassettes with a large opening area for improved washing and drying performance.

Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.
・Wafer size:
125mm
・Material:
PFA
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Features

- WD series is a mounted drying cassette with maximum opening and is not compatible with handles or spin dryers.
- K-1 and K-2 are special cassettes that are 150 mm wafer cassette size and can retain 125 mm wafers.

Dimensions

Product List (mm)

Part No. BOX Handles Wafer
Capacity
A1
Length
A2
Width
A3
Height
B2
Slot Pitch
C3
Pocket Flat
D6
Foot Width
D1
D1 Pitch
KM-507-U CB-5605TX HM-50 25 142.2 153.0 144.5 4.76 76.2 13.97
KM-50NA CB-5605TX HM-50 25 142.2 153.0 145.5 4.76 1.6 76.2 13.97
KM-50NAT CB-5605TX HM-50 25 142.2 153.0 145.5 4.76 1.6 76.2 13.97
KM-50NM CB-5605TX HM-50 25 142.2 153.0 146.0 4.76 1.6 108.0 13.97
KM-50WD 25 143.4 153.0 146.0 4.76 50.0 14.54
K-1 25 143.4 177.8 171.5 4.76 1.5 88.9 14.54
K-2 25 143.4 177.8 171.5 4.76 1.5 88.9 14.54
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