Product Information
75mm PEEK Cassettes
Wafer Handling
Anti-static PEEK cassettes for continuous use in high-temperature environments.
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environments.- ・Wafer size：
- 75mm
- ・Material：
- PEEK
Product List (mm)
| Part No. | BOX | Handles | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| KM-302K-SA | – | – | 25 | 140.5 | 93.1 | 83.0 | 4.76 | 1.5 | 38.4 | 13.97 |
| KM-302KE-SA | – | – | 25 | 140.5 | 93.1 | 83.0 | 4.76 | 1.5 | 38.4 | 13.97 |
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