Product Information
Handles
Wafer Handling
Handles for various wafer cassettes
These handles allow the cassette to be safely moved and immersed into the chamber and other areas.- ・Material：
- PFA, PTFE
Features
- H-type handle is exclusively for square substrate cassettes (MASK series) and special cassettes (K series) wafer cassettes.
- HM-1203 is dedicated to 300mm PFA cassette KM-1201-A2.
Product List (mm)
| Part No. | Material | Wafer Size |
Width | Height |
| H-01 | PFA | 50mm | 152 | 208 |
| HM-20 | PFA | 50mm | 152 | 208 |
| HM-25 | PFA | 63mm | 152 | 208 |
| HM-30 | PFA | 75mm | 152 | 208 |
| HM-40 | PFA | 100mm | 152 | 208 |
| HM-50 | PFA | 125mm | 152 | 208 |
| HM-60 | PFA | 150mm | 152 | 208 |
| HM-80 | PFA | 200mm | 228 | 235 |
| HM-1203 | PTFE | 300mm | 340 | 255 |
Related product
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- Wafer size：300mm
- Material：PC, PBT
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- Wafer size：200mm
- Material：PC, PP
The environmentally friendly design conserves resources by allowing only the necessary parts to be replaced
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- Wafer size：150mm
- Material：PC, PP
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