Product Information
MASK series for square substrates
Wafer Handling
Washing cassettes capable of carrying square substrates.
There are two types of cassettes: the wafer cassette type that can be used with the HM handle, and the basket type that can be used with the H handle.- ・Wafer size：
- 125mm, 100mm, 60mm, 50mm
- ・Material：
- PFA
Features
- AM-100 and 50MASK are wafer cassette type.
Product List (mm)
| Part No. | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| 100MASK | 20 | 156.0 | 125.0 | 78.0 | 4.76 | 3.0 | 85.0 | – |
| AM-100 | 25 | 142.2 | 125.5 | 120.0 | 4.76 | 1.5 | 85.0 | 13.97 |
| KM-513-MA | 20 | 158.0 | 153.0 | 115.0 | 6.35 | 3.0 | 85.0 | – |
| 60MASK | 25 | 143.0 | 78.0 | 57.0 | 4.76 | – | 17.9 | 47.00 |
| 50MASK | 25 | 142.1 | 68.0 | 70.0 | 4.76 | – | 36.7 | 4.76 |
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