Product Information
300mm FOUP
Wafer Handling
300mm Wafer Processing (FOUP)
FOUP for long term operation
FOUP for 300mm wafers that enables long term operation with high dimensional accuracy and use of carefully selected materials- ・Wafer size：
- 300mm
- ・Material：
- PC
Features
・Reuse & recycle
・Complies with SEMI standard (M31/E1.9/E47.1/E15.1/E57/E62)
・All major parts are made of conductive materials (E7～E10)
・Improved reliability during long-term use
Concept
Redundant lid gaskets are used to prevent particles from entering from the outside.
In addition, a round latch is used to reduce the opening surface area around the latch key to prevent particles from flying in from inside the lid. Holds 26 wafers (The 26th wafer is a dummy that is used to protect the 25th wafer).
This container is designed to be environmentally friendly and conserve resources by only requiring the necessary parts to be replaced.
Product List
| P/N | Material | Wafer Size |
|---|---|---|
| KT-3003MIR | PC | 300mm |