Product Information
300mm FOUP
FOUP for long term operation
FOUP for 300mm wafers that enables long term operation with high dimensional accuracy and use of carefully selected materials- ・Wafer size：
- 300mm
- ・Material：
- PC
Features
・Reuse & recycle
・Complies with SEMI standard (M31/E1.9/E47.1/E15.1/E57/E62)
・All major parts are made of conductive materials (E7～E10)
・Improved reliability during long-term use
Concept
Redundant lid gaskets are used to prevent particles from entering from the outside.
In addition, a round latch is used to reduce the opening surface area around the latch key to prevent particles from flying in from inside the lid. Holds 26 wafers (The 26th wafer is a dummy that is used to protect the 25th wafer).
This container is designed to be environmentally friendly and conserve resources by only requiring the necessary parts to be replaced.
Product List
| P/N | Material | Wafer Size |
|---|---|---|
| KT-3003MIR | PC | 300mm |
Related product
300mm FOSB
- Wafer size：300mm
- Material：PC, PBT
This is a 300 mm wafer shipping box for safely transporting wafers. It can be opened and closed using a robot to contribute to automating the wafer shipping process and acceptance process.
200mm Clean Pack
- Wafer size：200mm
- Material：PC, PP
The environmentally friendly design conserves resources by allowing only the necessary parts to be replaced
150mm Clean Pack
- Wafer size：150mm
- Material：PC, PP
Shipping box for 150mm wafers, designed to enable replacement of only the necessary parts in consideration of the environment and resources.