Product Information
75mm and smaller PFA Cassettes
Wafer Handling
PFA cassettes with a large opening area for improved washing and drying performance.
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.- ・Wafer size：
- 75mm , 63mm, 50mm, 38mm
- ・Material：
- PFA, PP
Features
- K-30 and K-30-52 are basket type and cannot be placed horizontally on a wafer, and compatible handle is H series.
- WD series is an installed drying cassette with maximum opening and is not compatible with handles or spin dryers.
- K-20 and K-15 are basket type and cannot be used for horizontal wafer placement.
Product List (mm)
| Part No. | Wafer Size |
Handles | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| K-30 | 75mm | H-01 | 25 | 154.0 | 92.5 | 83.2 | 4.70 | 2.4 | 49.0 | 20.00 |
| K-30-52 | 75mm | H-01 | 52 | 154.0 | 92.5 | 83.2 | 2.38 | 0.7 | 49.0 | 20.00 |
| KM-30 | 75mm | HM-30 | 25 | 142.3 | 93.6 | 83.0 | 4.76 | 1.6 | 38.5 | 13.90 |
| KM-30N | 75mm | HM-30 | 25 | 142.2 | 102.8 | 82.6 | 4.76 | 1.4 | 28.9 | 13.97 |
| KM-30WD | 75mm | – | 25 | 142.2 | 102.8 | 82.6 | 4.76 | 41.6 | 13.97 | |
| KM-30PN | 75mm | HM-30 | 25 | 142.2 | 94.0 | 82.6 | 4.76 | 1.6 | 38.9 | 13.97 |
| KM-25 | 63mm | HM-25 | 25 | 142.2 | 78.0 | 73.2 | 4.76 | 1.6 | 48.6 | 13.97 |
| KM-25-51 | 63mm | HM-25 | 51 | 142.2 | 77.0 | 73.2 | 2.38 | 0.8 | 48.5 | 13.97 |
| K-20 | 50mm | H-01 | 25 | 150.0 | 67.0 | 54.0 | 4.75 | 1.2 | 31.0 | |
| KM-20 | 50mm | HM-20 | 25 | 142.1 | 67.8 | 59.0 | 4.76 | 1.3 | 34.0 | 13.90 |
| K-15 | 38mm | H-01 | 25 | 151.0 | 58.0 | 45.5 | 4.76 | 1.4 | 24.0 |
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