Product Information
200mm PEEK Cassettes
Wafer Handling
Anti-static PEEK cassettes for continuous use in high-temperature environments.
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environments.- ・Wafer size：
- 200mm
- ・Material：
- PEEK
Features
- KM-839K-A1 is capable of carrying 26 wafers.
- KM-839K-H1 is the same shape as KM-839K-A1 and is a double-pitch type containing 13 wafers.
- KM-841K-H2 has a slot width of 2.63 mm and can be used with wafers of 1 mm or more in thickness.
Product List (mm)
| Part No. | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| CW-08KE | 25 | 203.2 | 240.0 | 217.4 | 6.35 | 1.9 | 114.3 | 25.40 |
| CW-08KE-T | 25 | 203.2 | 240.0 | 217.4 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-839K-A1 | 26 | 209.6 | 235.0 | 219.0 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-841K-H1 | 25 | 203.2 | 234.2 | 219.1 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-841K-H2 | 25 | 203.2 | 234.2 | 219.1 | 6.35 | 2.6 | 114.3 | 25.40 |
| KM-839K-H1 | 13 | 209.6 | 235.0 | 219.0 | 12.70 | 8.3 | 114.3 | 28.60 |
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