Product Information
200mm PBT Cassettes
Wafer Handling
Cassette for wafer transfer using semiconductor grade material.
Antistatic cassette made of PBT (polybutylene terephthalate) plastics and compounded with conductive materials.- ・Wafer size：
- 200mm
- ・Material：
- PBT
Features
- KM-854NE-A and H have a wafer capacity of 26 pieces.
- KM-854NE-H4 is a double-pitch model with a wafer capacity of 13 wafers.
Product List (mm)
| Part No. | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| KM-834NE-H | 25 | 203.2 | 234.2 | 218.2 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-854NE-A | 26 | 209.6 | 235.0 | 219.0 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-854NE-H | 26 | 209.6 | 235.0 | 219.0 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-854NE-H4 | 13 | 209.6 | 235.0 | 219.0 | 12.70 | 8.3 | 114.3 | 28.60 |
| KM-855NE-A | 25 | 203.2 | 235.0 | 219.0 | 6.35 | 1.8 | 114.3 | 25.40 |
| KM-855NE-H | 25 | 203.2 | 235.0 | 219.0 | 6.35 | 1.8 | 114.3 | 25.40 |
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