Product Information
150mm PFA Cassettes
Wafer Handling
PFA cassettes with a large opening area for improved washing and drying performance.
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.- ・Wafer size：
- 150mm
- ・Material：
- PFA
Features
- WD series is a mounted drying cassette with the maximum opening and is not compatible with handles or spin dryers.
- KM-60N is a double pitch specification with a wafer capacity of 12 wafers.
Product List (mm)
| Part No. | BOX | Handles | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| KM-602-A | CB-5605TX | HM-60 | 25 | 143.4 | 178.0 | 171.5 | 4.76 | 1.6 | 89.0 | 14.54 |
| KM-602-U | CB-5605TX | HM-60 | 25 | 143.4 | 178.0 | 171.5 | 4.76 | 1.6 | 89.0 | 14.54 |
| KM-604-U | CB-5605TX | HM-60 | 25 | 142.2 | 187.0 | 165.0 | 4.76 | 1.6 | 89.0 | 13.97 |
| KM-615-A1 | CB-5605TX | HM-60 | 25 | 143.4 | 177.8 | 171.5 | 4.76 | 1.5 | 88.9 | 14.54 |
| KM-626-U | CB-5605TX | HM-60 | 25 | 143.4 | 177.8 | 165.0 | 4.76 | 1.5 | 88.9 | 14.54 |
| KM-60NA | CB-5605TX | HM-60 | 25 | 142.2 | 187.0 | 165.0 | 4.76 | 1.6 | 89.0 | 13.97 |
| KM-60NAT | CB-5605TX | HM-60 | 25 | 142.8 | 178.0 | 171.5 | 4.76 | – | 89.0 | 14.54 |
| KM-60NM | – | HM-60 | 25 | 142.2 | 187.0 | 165.0 | 4.76 | 1.6 | 131.0 | 13.97 |
| KM-60WD | – | – | 25 | 134.3 | 177.8 | 171.5 | 4.76 | 0.8 | 111.0 | 14.54 |
| KM-60N | – | – | 12 | 142.2 | 187.0 | 165.0 | 9.53 | 3.5 | 132.7 | 14.20 |
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