Product Information
100mm PFA Cassettes
Wafer Handling
PFA cassettes with a large opening area for improved washing and drying performance.
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.- ・Wafer size：
- 100mm
- ・Material：
- PFA
Features
- K-40 and K-40-52 are basket type and cannot be placed horizontally on a wafer, and ―compatible handle is ―H series.
- WD series is an installed drying cassette with ―maximum opening and is not compatible with handles or spin dryers.
Product List (mm)
| Part No. | BOX | Handles | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| K-40 | – | H-01 | 25 | 146.0 | 124.0 | 112.0 | 4.76 | 1.8 | 60.3 | 20.20 |
| K-40-52 | – | H-01 | 52 | 155.0 | 120.0 | 115.0 | 2.38 | 0.6 | 72.0 | |
| KM-40N | CB-404 | HM-40 | 25 | 142.2 | 125.5 | 114.3 | 4.76 | 1.6 | 61.0 | 13.97 |
| KM-40S | CB-404 | – | 25 | 142.2 | 124.5 | 114.3 | 4.76 | 1.5 | 61.6 | 13.97 |
| KM-40NA | CB-404 | – | 25 | 142.2 | 125.5 | 114.3 | 4.76 | 1.6 | 61.0 | 13.97 |
| KM-40WD | – | – | 25 | 142.2 | 125.5 | 114.3 | 4.76 | 50.0 | 13.97 | |
| KM-1005 | – | – | 25 | 142.2 | 153.0 | 145.5 | 4.76 | 76.2 | 13.97 |
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