Product Information
100mm Aluminum Cassettes
Wafer Handling
Heat-resistant cassette made of extruded aluminum slots.
The surface of the slots where the wafers come in contact with the cassette can be treated with electroless nickel and anodizing, in addition to the standard fluorine coating.- ・Wafer size：
- 100mm
- ・Material：
- Aluminium
Features
- The opening of the cassette is equipped with a fluoroplastic wafer receiver to prevent damage during wafer insertion. (It cannot be used in the temperature range that exceeds the heat resistance of fluoroplastic.
Product List (mm)
| Part No. | Wafer Capacity |
Length | Width | Height | Slot Pitch | D1 Pitch |
| MC-40 | 25 | 142.2 | 116.0 | 110.0 | 4.76 | 13.97 |
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