Product Information
125mm PFA Cassettes
Wafer Handling
PFA cassettes with a large opening area for improved washing and drying performance.
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.- ・Wafer size：
- 125mm
- ・Material：
- PFA
Features
- WD series is a mounted drying cassette with maximum opening and is not compatible with handles or spin dryers.
- K-1 and K-2 are special cassettes that are 150 mm wafer cassette size and can retain 125 mm wafers.
Product List (mm)
| Part No. | BOX | Handles | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| KM-507-U | CB-5605TX | HM-50 | 25 | 142.2 | 153.0 | 144.5 | 4.76 | 76.2 | 13.97 | |
| KM-50NA | CB-5605TX | HM-50 | 25 | 142.2 | 153.0 | 145.5 | 4.76 | 1.6 | 76.2 | 13.97 |
| KM-50NAT | CB-5605TX | HM-50 | 25 | 142.2 | 153.0 | 145.5 | 4.76 | 1.6 | 76.2 | 13.97 |
| KM-50NM | CB-5605TX | HM-50 | 25 | 142.2 | 153.0 | 146.0 | 4.76 | 1.6 | 108.0 | 13.97 |
| KM-50WD | – | – | 25 | 143.4 | 153.0 | 146.0 | 4.76 | 50.0 | 14.54 | |
| K-1 | – | – | 25 | 143.4 | 177.8 | 171.5 | 4.76 | 1.5 | 88.9 | 14.54 |
| K-2 | – | – | 25 | 143.4 | 177.8 | 171.5 | 4.76 | 1.5 | 88.9 | 14.54 |
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