Product Information
150mm PBT Cassette
Wafer Handling
This transport cassette uses semiconductor grade material.
Antistatic cassette made of PBT (polybutylene terephthalate) plastics and compounded with conductive materials.- ・Wafer size：
- 150mm
- ・Material：
- PBT, PBT+CP
Features
･KM-610T-A2(White) and KM-610NE-A2(Black) hold 12 wafers and have a groove pitch of twice.
Product List
| Product List | Material | Wafer | 対応BOX | 対応ハンドル | B1キャパシティ | A1(Length ) | A2(Max.width) | A3(Height) | B2(Groove pitch) | C3(ポケットフラット) | D6(Leg internal dimension) | D1(1枚目ピッチ) | BL(Hバー寸法) |
| KM-610TX-A2 | PBT | 150 | 12 | 142.81 | 168.00 | 163.50 | 9.53 | 3.80 | 89.00 | 21.68 | 131.00 | ||
| KM-610NE-A2 | PBT+CP | 150 | 12 | 142.81 | 168.00 | 163.50 | 9.53 | 3.80 | 89.00 | 21.68 | 131.00 | ||
| KM-627NE-SA | PBT+CP | 150 | 25 | 143.38 | 177.80 | 163.60 | 4.76 | 1.52 | 88.90 | 14.65 | 131.06 | ||
| KM-627NE-SH | PBT+CP | 150 | 25 | 143.38 | 177.80 | 163.60 | 4.76 | 1.52 | 88.90 | 14.65 | 131.06 | ||
| KM-631NE-H | PBT+CP | 150 | 25 | 142.24 | 187.50 | 165.00 | 4.76 | 1.60 | 89.00 | 13.97 | 131.00 |
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