Product Information
150mm PEEK Cassettes
Wafer Handling
Anti-static PEEK cassettes for continuous use in high-temperature environments.
A PEEK (polyetheretherketone) plastics cassette with a proven track record of high durability, which can be used continuously in high-temperature environments.- ・Wafer size：
- 150mm
- ・Material：
- PEEK
Features
- KM-628K-SH has a wafer capacity of 26 wafers.
- KM-632K-SA is a 200mm cassette compatible with a wafer capacity of 26 wafers and a slot pitch (B2) of 6.35 mm.
Product List (mm)
| Part No. | BOX | Handles | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| CW-06KE-T2 | – | – | 25 | 143.4 | 177.8 | 165.1 | 4.76 | 1.5 | 88.9 | 14.54 |
| KM-627K-SA | CB-5602TX3 | HM-60 | 25 | 143.4 | 177.8 | 164.0 | 4.76 | 1.5 | 88.9 | 14.54 |
| KM-627K-SH | CB-5602TX3 | HM-60 | 25 | 143.4 | 177.8 | 164.0 | 4.76 | 1.5 | 88.9 | 14.54 |
| KM-628K-SH | CB-5602TX3 | – | 26 | 149.6 | 177.8 | 164.0 | 4.76 | 1.5 | 88.9 | 14.54 |
| KM-632K-SA | CB-5602TX3 | – | 26 | 203.2 | 177.8 | 164.0 | 6.35 | 2.2 | 88.9 | 25.40 |
Related product
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200mm Clean Pack
- Wafer size：200mm
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The environmentally friendly design conserves resources by allowing only the necessary parts to be replaced
150mm Clean Pack
- Wafer size：150mm
- Material：PC, PP
Shipping box for 150mm wafers, designed to enable replacement of only the necessary parts in consideration of the environment and resources.