Product Information
200mm PFA Cassettes
Wafer Handling
PFA cassettes with a large opening area for improved washing and drying performance.
Wafer washing cassette made of fluoroplastic PFA, which has a proven track record of stable quality.- ・Wafer size：
- 200mm
- ・Material：
- PFA
Features
- KM-80NA has a slot pitch (B2) of 4.76 mm, the same wafer position as a wafer cassette of 6 inches or less.
- KM-804-H is a half-type cassette, ideal for washing and drying.
Product List (mm)
| Part No. | Wafer Capacity |
A1 Length |
A2 Width |
A3 Height |
B2 Slot Pitch |
C3 Pocket Flat |
D6 Foot Width |
D1 D1 Pitch |
| KM-803-H | 25 | 203.2 | 240.0 | 217.4 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-804-H | 25 | 203.2 | 240.0 | 155.0 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-822-A1 | 25 | 203.2 | 240.0 | 217.4 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-822-A2 | 25 | 203.2 | 240.0 | 217.4 | 6.35 | 1.9 | 114.3 | 25.40 |
| KM-80NA | 25 | 152.4 | 250.0 | 220.0 | 4.76 | 1.6 | 120.0 | 4.76 |
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