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Product Information

300mm PFA Cassettes

Wafer Handling

PFA cassette that the opening surface area was made wide to facilitate washing and drying.

This is a cassette for wafers washing made of fluoroplastic PFA, and has been used successfully for a stable product.
・Wafer size:
300mm
・Material:
PFA
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Features

・There are two types of PFA cassettes: one holds 13 wafers and the other holds 15 wafers.

Product List

P/N Material Wafer Handles B1
Wafer Capacity
KM-1201-A2 PFA 300mm HM-1203 13
KM-1205-A PFA 300mm HM-1205 15
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