Product Information
300mm PFA Cassettes

Wafer Handling
PFA cassette that the opening surface area was made wide to facilitate washing and drying.
This is a cassette for wafers washing made of fluoroplastic PFA, and has been used successfully for a stable product.- ・Wafer size:
- 300mm
- ・Material:
- PFA
Features
・There are two types of PFA cassettes: one holds 13 wafers and the other holds 15 wafers.
Product List
P/N | Material | Wafer | Handles | B1 Wafer Capacity |
KM-1201-A2 | PFA | 300mm | HM-1203 | 13 |
KM-1205-A | PFA | 300mm | HM-1205 | 15 |
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