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Product Information

125mm Aluminum Cassettes

Wafer Handling

Heat-resistant cassette made of extruded aluminum slots.

The surface of the slots where the wafers come in contact with the cassette can be treated with electroless nickel and anodizing, in addition to the standard fluorine coating.
・Wafer size:
125mm
・Material:
Aluminium
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Product List (mm)

Part No. Wafer
Capacity
Length Width Height Slot Pitch D1 Pitch
MC-50 25 142.2 140.0 140.0 4.76 13.97
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